Industry News

Chemtronics invests KRW 17 billion to expand EUV photoresist material production in Korea

Update time : 2023-11-27 10:36:18

Chemtronics, a Korean company, announced that it will invest 17 billion won to expand its production of EUV photoresist chemistry in Korea. The company produces ultra-high concentration PGMEA (Propylene Glycol Monomethyl Ether Acetate), which accounts for 70~80% of the composition of EUV photoresist, and is currently restricted from being exported to the outside world by Japan.Chemtronics said that it will expand the production capacity of PGMEA by a factor of 2.5.

Dongjin Semichem, another South Korean semiconductor chemistries supplier, also announced plans to develop a new generation of high-NA photoresists to meet future demand from the growing number of ASML EUV lithography machines.
In 2022, Chemtronics invested 20 billion won to establish a PGMEA production facility in South Korea, which currently produces about 10,000 tons per year, with the goal of increasing production to 25,000 tons by 2025. The product has a purity of 99.999% (5N) and can be used for further manufacturing of EUV photoresists.
The current EUV photoresist market is dominated by Japanese manufacturers such as JSR, Shin-Etsu Chemical, and TOK, but Japan restricts exports to South Korea, China, and others. Sources say Chemtronics has delivered samples to customers and conducted quality validation, and if it passes the validation successfully, it will be ready for shipment in the first half of 2024.
PGMEA currently on the market contains 100~300 ppm of β-leucine chemicals, which is harmful to the human body, Chemtronics said its PGMEA products contain only 1~2 ppm of trace β-leucine, which is in full compliance with the ESG standards required by customers.

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