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AIXTRON and AIXTRON announce AIXTRON G5+ C and G10-AsP systems for 200mm wafers for Micro LED applications certified by AIXTRON

Update time : 2023-02-17 11:01:10

(SIX Swiss Exchange: AMS), a leading global supplier of optical solutions, and AIXTRON SE (Frankfurt: AIXA), a leading supplier of deposition equipment for the semiconductor industry, jointly announced that the 200mm wafer AIXTRON G5+ C and G10-AsP systems have been certified by AIXTRON that can be used to meet the demands of Micro LED applications.

AIXTRON's MOCVD systems AIX G5+ C and the new G10-AsP offer AIXTRON Planetary Technology, paving the way for the next generation of high resolution Micro LED displays. As early as the first quarter of 2022, Ahmeys Osram announced plans for a 200mm capacity increase to enable LED and Micro LED capacity at its existing plant in Malaysia. the MOCVD system is expected to help enable volume production of Micro LEDs, creating a new generation of display applications.
Robert Feurle, Executive Vice President and Head of Business for Opto Semiconductors at Amax Osram, said: "AIXTRON and Amax Osram have a long-standing relationship and we are familiar with the performance and quality standards of their equipment. For mission-critical projects, such as the development and production of Micro LEDs for AsP and GaN devices, AIXTRON is exactly the partner we need."
Dr. Felix Grawert, CEO and President of AIXTRON, added: "The successful certification of the G10-AsP and AIX G5+ C by Ahmeys Osram is a very important milestone in our company's history. Ahmers Osram is the world's leading LED manufacturer and is well positioned to bring new, fundamental technologies to market. We are facing a major shift from traditional display technology to the new Micro LED display technology. Today, AIXTRON is stepping into a future growth market with huge potential and we have an ideal partner working with us."
Micro LEDs offer very significant advantages, such as higher pixel density, longer lifetime, higher brightness, faster switching speeds and wider colour spectrum, further enhancing display technology. The relatively low energy consumption is also an important advantage, making Micro LED technology ideal for the next generation of consumer electronics devices with smaller displays, which often have very limited space for batteries.
Micro LEDs have special production requirements: their mass production process includes a special batch transfer process step where thousands of micron-sized LED chips (arrays) are picked and placed. Any defects can lead to pixel necrosis, rendering the entire array useless. Therefore, a virtually error-free epitaxial process must be used to minimise defects and support high yield and cost-effective Micro LED production.
AIXTRON's new G10-AsP epitaxial tool has been carefully designed to meet the specific needs of this application. This new tool is the world's first fully automated AsP reactor, offering fully automated cassette-to-cassette wafer loading and an in-situ etch-based cleaning mechanism. The combination of these two features can have a significant impact on yield. In addition, the intermittent reactor technology brings several advantages to the AIXTRON system: its production cost per wafer is one of the lowest in the market today and its throughput per cleanroom area is one of the highest. At the same time, the new tool has precise flow and temperature control to maintain very good material uniformity during continuous operation.

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