Industry News

Canon Launches New Wafer Measuring Machine MS-001: Higher Accuracy than Photolithography for Improved Production Efficiency

Update time : 2023-02-24 17:28:48

Feb. 21, - In the field of advanced semiconductors such as logic, memory, and CMOS sensors, manufacturing processes are becoming increasingly complex, and semiconductor component manufacturers need to improve the accuracy of register lithography in order to produce high-precision semiconductor components, and thus the number of alignment measurement points to be measured before exposure is increasing.

If a large number of measurement points are aligned in a semiconductor lithography machine, the measurement itself will be very time-consuming, which will reduce the productivity of the semiconductor lithography machine. For this reason, wafer measurement machines have been introduced in the semiconductor manufacturing field to separate the alignment measurement function from the semiconductor lithography machine to ensure high accuracy and efficiency in production.
On February 21, Canon launched "MS-001", a wafer measuring machine for semiconductor manufacturing, which enables high-precision alignment measurement of wafers.
The MS-001 is equipped with an alignment oscilloscope with an area sensor that enables multi-pixel measurement and reduces noise during measurement. In addition, the MS-001 can measure multiple types of alignment marks.
With the newly developed alignment oscilloscope light source, the new product can provide a wavelength range 1.5 times larger than that measured in semiconductor lithography equipment, enabling alignment measurements at any wavelength desired by the user. As a result, the "MS-001" can achieve higher alignment measurement accuracy than that of measurements in semiconductor lithography equipment.
With the application of the new product, Canon says that most of the alignment measurements can be performed uniformly before the wafer is delivered to the semiconductor lithography equipment, reducing the workload of alignment measurement operations in the semiconductor lithography equipment and thus improving the productivity of the semiconductor lithography equipment.

Previous : Qualcomm (QCOM. US) launched cloud software services around its supply chain chips

Next : Omdia: AMOLED display driver chip shipments are expected to increase by 14% year-on-year this year

How to Identify Legitimate Sellers When Purchasing Electronic Components Online？

Dec .31.2024

Purchasing electronic components online is different from buying clothes online. One needs to understand various aspects. When shopping online for electronic components, one must have a basic knowledge of electronic components and know how to distinguish

Development Directions and Innovation Trends of the Electronic Components Market in 2025

Dec .31.2024

With the continuous progress of science and technology and the development of the global economy, the electronic components industry has shown a rapid development trend in recent years. From consumer electronics to industrial automation, from automotive e

Resistance Thermometer Temperature Sensors

Dec .31.2024

A resistance thermometer is a common temperature sensor that measures temperature by utilizing the property that the resistance of materials changes with temperature. Resistance thermometers are widely used in various fields, including industrial control,

Say Goodbye to Lag! Three Ways to Speed Up WiFi

Dec .31.2024

Don't worry. By learning the following three methods, your WiFi experience can be greatly improved! Let's improve the home WiFi signal from three aspects: transmission power, wireless channels, and location with the agency of Cirrus Logic. Say goodbye to

About Us

About Us What we do Quality People

Products

CHIP/IC Active devices Passive device Components OTHER

China electronic components supplier----Wah Luen Shing Electronic.----www.wlschip.com

Leave a message