Industry News

Canon Launches New Wafer Measuring Machine MS-001: Higher Accuracy than Photolithography for Improved Production Efficiency

Update time : 2023-02-24 17:28:48

Feb. 21, - In the field of advanced semiconductors such as logic, memory, and CMOS sensors, manufacturing processes are becoming increasingly complex, and semiconductor component manufacturers need to improve the accuracy of register lithography in order to produce high-precision semiconductor components, and thus the number of alignment measurement points to be measured before exposure is increasing.

If a large number of measurement points are aligned in a semiconductor lithography machine, the measurement itself will be very time-consuming, which will reduce the productivity of the semiconductor lithography machine. For this reason, wafer measurement machines have been introduced in the semiconductor manufacturing field to separate the alignment measurement function from the semiconductor lithography machine to ensure high accuracy and efficiency in production.
On February 21, Canon launched "MS-001", a wafer measuring machine for semiconductor manufacturing, which enables high-precision alignment measurement of wafers.
The MS-001 is equipped with an alignment oscilloscope with an area sensor that enables multi-pixel measurement and reduces noise during measurement. In addition, the MS-001 can measure multiple types of alignment marks.
With the newly developed alignment oscilloscope light source, the new product can provide a wavelength range 1.5 times larger than that measured in semiconductor lithography equipment, enabling alignment measurements at any wavelength desired by the user. As a result, the "MS-001" can achieve higher alignment measurement accuracy than that of measurements in semiconductor lithography equipment.
With the application of the new product, Canon says that most of the alignment measurements can be performed uniformly before the wafer is delivered to the semiconductor lithography equipment, reducing the workload of alignment measurement operations in the semiconductor lithography equipment and thus improving the productivity of the semiconductor lithography equipment.

Previous : Qualcomm (QCOM. US) launched cloud software services around its supply chain chips

Next : Omdia: AMOLED display driver chip shipments are expected to increase by 14% year-on-year this year

How many chips does a car need?

Sep .19.2024

Automotive chips can be divided into four types according to their functions: control (MCU and AI chips), power, sensors, and others (such as memory). The market is monopolized by international giants. The automotive chips people often talk about refer to

Position and Function of Main Automotive Sensors

Sep .18.2024

The function of the air flow sensor is to convert the amount of air inhaled into the engine into an electrical signal and provide it to the electronic control unit (ECU). It is the main basis for determining the basic fuel injection volume. Vane type: The

Chip: The increasingly intelligent electronic brain

Sep .14.2024

In this era of rapid technological development, we often marvel at how mobile phones can run various application software smoothly, how online classes can be free of lag and achieve zero latency, and how the functions of electronic devices are becoming mo

LDA100 Optocoupler: Outstanding Performance, Wide Applications

Sep .13.2024

In terms of characteristics, LDA100 is outstanding. It offers AC and DC input versions for optional selection, enabling it to work stably in different power supply environments. The small 6-pin DIP package not only saves space but also facilitates install

About Us

About Us What we do Quality People

Products

CHIP/IC Active devices Passive device Components OTHER

China electronic components supplier----Wah Luen Shing Electronic.----www.wlschip.com

Leave a message